NewBee Machinery is a professional machinery parts manufacturer providing high quality precision bearings, high-quality non-standard transmission components, and intelligent CNC equipment and more.
NewBee Machinery is a professional machinery parts manufacturer providing high quality precision bearings, high-quality non-standard transmission components, and intelligent CNC equipment and more.
Precision RU Crossed Roller Bearings are compact,high-rigidity rotational bearings featuring cylindrical rollers arranged at 90° angles in a V-groove.Unlike traditional bearings,their unique cross-pattern allows a single bearing to simultaneously handle complex multi-directional loads-including radial,axial,and moment (tilting) forces.These bearings are available in P5,P4 and P2 precision grades.The inner diameter ranges from 10mm to 350mm,the outer diameter from 52mm to 540mm,and the cross-section height varies between 8mm and 45mm.The mounting holes support specifications from M3 to M12.For materials,bearing rings and rollers are made of GCr15 high-carbon chromium steel with a surface hardness of HRC 60-62,or corrosion-resistant SUS440C stainless steel.Nylon 66 or high-strength brass is selected as the cage material.Two main sealing types are provided:open type for clean working environments and U/UU contact rubber seal for dust and splash resistance.In terms of lubrication,both standard grease lubrication and circulating oil lubrication for heavy-duty use are available.Standard RU models can be delivered within 7-15 days,while customized products will be scheduled according to specific technical requirements.
Lithography and inspection rotary stages are core ultra-precision motion components of semiconductor and microelectronics manufacturing equipment.Lithography rotary stages are key rotating units inside lithography machines,used for carrying silicon wafers,mask plates and completing ultra-precise angle alignment,rotating scanning and pattern transfer under vacuum ultra-clean environments.Inspection rotary stages are widely deployed in wafer defect detectors,thickness measuring instruments and optical metrology equipment,responsible for 360° rotating positioning of wafers to achieve full-surface microscopic scanning,defect detection and dimensional measurement.These rotary stages are integrated with servo motors,encoders and vacuum suction fixtures on main spindles in advance.During continuous high-frequency indexing and rotation,they bear the weight of wafers and alternating overturning moments.The production environment requires extremely low particle generation,zero vibration and nanoscale positioning tolerance.Any bearing jitter,rotation runout or particle pollution will lead to pattern offset,wafer detection error and massive chip scrap.Therefore,the bearing’s precision,rigidity,cleanliness and low particle performance directly determine lithography yield and inspection accuracy.
Multi-Directional Load Capacity:Because the cylindrical rollers are alternately crossed at right angles,a single bearing can support radial,axial,and tilting moment loads at the same time.Integrated Mounting Design:Unlike traditional bearings,RU series inner and outer rings are fully integrated.They include pre-drilled mounting holes,eliminating the need for a separate presser flange or fixing housing.
High Rigidity and Accuracy:Bearings are preloaded,minimizing elastic deformation under heavy loads and ensuring high running accuracy (often up to P5,P4,or P2 grades).
Space and Weight Efficiency:By consolidating multiple bearings into a single compact unit,equipment size and weight can be significantly reduced.
Stable Rotational Torque:Equipped with spacer retainers between the rollers,they offer a low friction coefficient,resulting in highly stable,smooth rotational torque.
Industrial Robotics:Found in basic motion parts such as robot waists,elbows,and rotary joints.Their rigidity allows them to support heavy moment loads at high speeds.
Precision Machine Tools:Utilized in rotary tables,index heads,and spindles for CNC machines and machining centers.
Semiconductor Fabrication:Provide the micron-scale accuracy required for wafer transfer robot arms,photolithography machines,and precise rotary indexing.
Medical & Lab Equipment:Built into rotating parts of advanced diagnostic tools like CT scanners,MRI machines,and robotic surgery components.
Optical & Measuring Instruments:Employed in high-precision astronomical telescopes,CMM (Coordinate Measuring Machines) rotary tables,and laser measuring devices.
Simplify Ultra-Clean Equipment Assembly:The integral RU bearing body with built-in PCD mounting holes can be directly bolted to the stage spindle without extra flanges or bearing housings.It fits pre-installed servo and encoder components without disassembly,reducing structural gaps that trap micro dust and particles.This streamlined structure meets strict cleanroom standards and shortens equipment assembly and debugging cycles.
Bear Multi-Axis Composite Loads Stably:One RU bearing replaces multiple ordinary bearing groups to simultaneously bear wafer weight,axial suction force and rotary tilting moments.Uniform stress distribution avoids spindle deformation during long-time continuous rotation,maintaining the flatness of wafer carrying surfaces.
Achieve Nanoscale Rotation Precision:Preload structure and ultra-low rotational runout (P4 grade ≤0.002mm) eliminate micro-jitter during rotation and indexing.Stable low-torque rotation ensures mask-wafer alignment accuracy in lithography and eliminates detection dead zones for wafer inspection,drastically improving chip production yield.
Fit Miniaturized Vacuum Stage Layout:Ultra-thin cross-section design saves precious internal space of vacuum chambers.Lightweight bearing structure lowers stage motion inertia,accelerates dynamic response speed,and supports high-speed frequent indexing required by high-throughput semiconductor production lines.
Meet Cleanroom & Vacuum Working Requirements:Custom low-outgassing special vacuum grease and stainless steel RU options are available.Open cleanroom-type bearings produce few wear particles,preventing contamination of wafers and optical lenses inside lithography and inspection equipment.
Cut Long-Term Equipment Maintenance Costs:High-hardened raceways and rollers deliver excellent anti-fatigue performance,supporting 24-hour non-stop operation of lithography and inspection equipment.Low failure frequency reduces production line downtime and regular bearing replacement expenses.
Newbeetrans is a professional manufacturer specializing in RU crossed roller bearings.We deliver customized bearing solutions tailored for lithography rotary stages,wafer inspection rotary tables and all kinds of semiconductor precision equipment.
Semiconductor Customization:Develop zero-backlash,low-particle RU bearings with vacuum-compatible clean lubricants and stainless steel versions on demand.Customized samples can be finished within 10–15 days.
Strict Precision Manufacturing:All raceways and rollers adopt super-fine grinding to reach P5,P4 and P2 ultra-precision standards.Every unit undergoes full dimensional and cleanliness inspection before delivery.
Efficient Global Delivery:Standard RU bearings are in stock for quick shipment,with full multi-channel global logistics for overseas clients.
Authoritative Quality Certification:Products comply with ISO 9001 and GB/T 307.1 standards,SGS test reports can be provided upon request.
For technical specifications,pricing,or custom bearing solutions:
Email:paul@newbeetrans.com
Website:www.newbeetrans.com
WhatsApp
sales@newbeetrans.com
+8615090185276