South Korean customers: Precision bearing solutions for semiconductor wafer handling robots
Apr 21,2025
Background
Semiconductor wafer handling robots require extreme precision bearings that can operate in vacuum environments while minimizing particle generation. Newbee Transmission addressed critical bearing failures in 12-inch wafer robots (VHP/VHP+ models) where traditional bearings caused contamination and frequent downtime.
Solutions
1. Bearing Redesign:
Replaced steel components with Si3N4 ceramic hybrid bearings (Models: 4S-A10Si-3N4 pivot / S2-X060PTP-3N4 hub)
Implemented magnetic fluid seals to prevent lubricant leakage in vacuum (<10⁻⁶ Pa)
2. System Integration:
Developed zero-backlash harmonic drive systems with integrated ceramic bearings
Customized bearing geometries for ±1μm runout accuracy (SEMI E89 compliant)
3. Process Optimization:
Introduced cleanroom-compatible greases reducing particle generation by 99%
Implemented predictive maintenance protocols using vibration sensors.
Key Figures:
Precision: ≤±1μm runout
Load Capacity: 5T dynamic radial
Materials: Si3N4/ZrO2 ceramics
Standards: SEMI F72, ISO 9001/14001
Feedback
Performance Metric Improvement
Bearing MTBF： 1,200 → 15,000 hrs (12.5x)
Wafer defect rate： 0.05% → 0.002%
Energy consumption： Reduced 34%
