NewBee Machinery is a professional machinery parts manufacturer providing high quality precision bearings, high-quality non-standard transmission components, and intelligent CNC equipment and more.
NewBee Machinery is a professional machinery parts manufacturer providing high quality precision bearings, high-quality non-standard transmission components, and intelligent CNC equipment and more.
CRBH cross roller bearings are ultra-precision,high-rigidity bearings featuring cylindrical rollers arranged at right angles between the inner and outer rings.This single-unit design allows them to simultaneously handle complex loads in all directions-radial,axial,and moment.Core Basic Specifications Accuracy grades:P5,P4,P2 ultra-precision levels for micron-level positioning Metric size range:Inner diameter 20–1250 mm,outer diameter 36–1500 mm,cross-section height 8–110 mm;miniature models like CRBH208A with only 8mm cross-section fit tiny rotary joints inside vacuum wafer robots Material options:Bearing rings and rollers adopt GCr15 high-carbon chromium steel (surface hardness HRC 60–62) for standard industrial use;SUS440C stainless steel for corrosion-resistant,cleanroom and vacuum working conditions.Cage materials include lightweight Nylon 66,high-strength brass,and customized composite materials Sealing forms:Open type CRBH-A specially optimized for ultra-high vacuum chambers;double-side contact rubber sealed CRBH-AUU for external vacuum transmission frames with slight dust exposure Lubrication modes:Low-outgassing long-term vacuum grease lubrication for high/ultra-high vacuum environments (≤120°C);circulating oil lubrication is not applicable for vacuum working scenarios Delivery cycle:Standard stock models 7–15 days;customized vacuum dedicated non-standard specifications require separate negotiation on production lead time
Vacuum semiconductor equipments refer to a full set of core manufacturing devices that complete wafer processing,transfer and testing under high/ultra-high vacuum environment (10-³ ~ 10-⁸ Pa),covering front-end wafer processing and back-end packaging inspection equipment.Typical categories include vacuum wafer handling robots,ion implanters,sputtering deposition machines,CVD/PVD coating equipment,etching machines,vacuum alignment stages and vacuum optical inspection devices.All rotary joints,rotary alignment tables and swing arms inside the vacuum chamber must run stably under airless,low-pollution,high-temperature alternating environments.During continuous mass production,the rotary bearing bears the eccentric weight of silicon wafers,axial clamping force and frequent overturning moment brought by multi-angle rotation.The vacuum environment puts forward three rigid core requirements for bearings:ultra-low outgassing without volatile pollutants,zero micro-particle shedding to avoid wafer circuit contamination,ultra-low rotation jitter to guarantee sub-micron wafer positioning accuracy.Any gas release or tiny abrasive particles generated by bearings will cause film defects,circuit short circuits and massive wafer scrapping in vacuum process chambers.
Multi-Directional Load Capacity:Cylindrical rollers are arranged crosswise at 90° angles in a V-groove,allowing a single bearing to handle loads from all directions simultaneously.
Integrated,Non-Separable Rings:Because the inner and outer rings are solid and do not separate,the bearing's performance is unaffected by the surrounding mounting structure.
Smooth Rotation:They utilize separators between the rollers to prevent friction and ensure smooth,stable rotation,even at medium-to-high speeds.
High Precision & Rigidity:The line-contact design between rollers and raceways keeps elastic deformation incredibly small,resulting in superior stiffness and minimal backlash.
Industrial Robotics & Automation:They are the premier choice for articulating robot joints (bases,waists,and wrists) and speed reducers,where they provide the precise motion control and rigidity necessary for heavy or delicate tasks.
Machine Tools:Employed extensively in CNC rotary tables,grinding machines,and turning centers where heavy spinning components meet high resistance,they minimize mounting errors and offer high rigidity during operations.
Medical & Imaging Equipment:Their smooth,vibration-free rotation and compact size make them ideal for positioning articulating arms in labs and ensuring the precise rotation of camera or imaging components in CT scanners and MRI machines.
Semiconductor Manufacturing:They deliver the micron-scale precision and repeatability required for pick-and-place systems and wafer handling equipment.
Vacuum Semiconductor Equipments:Specially customized low-outgassing CRBH bearings serve as core rotary components for vacuum wafer transfer robot wrists,vacuum deposition swing mechanisms,etching machine indexing platforms and vacuum optical alignment stages,meeting ultra-clean vacuum process standards for chip manufacturing.
Ultra-low outgassing customized solutions prevent vacuum chamber contamination:Newbeetrans can match CRBH bearings with special vacuum low-vapor-pressure fluorinated grease and complete degassing baking treatment before delivery.Matched SUS440 stainless steel materials avoid volatile metal ions under vacuum heating,effectively eliminating organic gas precipitation that would pollute wafer thin films.Unlike ordinary bearings that release volatile substances in vacuum,CRBH vacuum customized versions maintain stable vacuum degree of process equipment and reduce pumping cycle time of vacuum chambers.
High rigidity composite load bearing stabilizes wafer transfer in vacuum cavity:Inside closed vacuum chambers,robotic arms frequently stretch and rotate to carry large-size thin silicon wafers,producing superposed radial,axial and overturning moment loads.A single integrated CRBH bearing evenly disperses multi-directional stress without needing multiple bearing groups for combined assembly,restraining micro bending deformation of cantilever arms under vacuum zero-gravity-like environment and keeping wafers horizontal without tilting or falling during high-speed transfer.
Vibration-free smooth rotation guarantees sub-micron vacuum alignment precision:Preloaded ultra-fine ground raceways completely eliminate internal clearance of CRBH bearings.In vacuum etching and deposition equipment's multi-angle fine-tuning rotary platforms,ultra-low rotation runout avoids optical path jitter and wafer offset,ensuring consistent alignment of lithography and coating processes,greatly improving chip yield rate and reducing defective products caused by positioning deviation.
Zero particle shedding design meets semiconductor clean vacuum standards:Polished roller end faces and integral non-split inner/outer ring structure reduce metal abrasive particle generation during long-cycle operation.Open CRBH-A vacuum dedicated models avoid rubber seal volatile substances,fully satisfying Class 1 ultra-clean vacuum cavity requirements,preventing micro-particle adsorption on wafer circuits and optical lenses inside the vacuum chamber.
Compact thin-wall structure optimizes vacuum chamber internal layout:The ultra-thin cross-section design of CRBH cancels redundant bearing stacking and fixing flanges,greatly reducing the occupied space of rotary mechanisms inside expensive vacuum chambers.Small-size CRBH miniature models can be embedded in narrow vacuum transmission channels,help equipment designers miniaturize vacuum cavity volume and lower overall equipment manufacturing cost.
Extended service life reduces vacuum equipment downtime:GCr15 or stainless steel CRBH with surface hardening treatment have 30% improved fatigue resistance,adapt to long-term continuous cyclic operation under vacuum alternating temperature environments.Low-friction structure lowers heat accumulation inside heat-insulated vacuum chambers,avoiding thermal expansion precision drift;less frequent disassembly maintenance reduces repeated vacuum pumping and production line stop loss caused by bearing replacement.
Simplify vacuum equipment mechanical assembly:Different from RB split outer ring bearings requiring secondary preload adjustment,CRBH integrated inner and outer rings complete fixed preload at factory stage.Equipment manufacturers do not need to design complex clearance adjusting structures for vacuum rotary components,shortening assembly and precision calibration cycles of vacuum semiconductor equipment and lowering the technical threshold of vacuum mechanism debugging.
Newbeetrans is a professional precision cross roller bearings manufacturer focusing on vacuum customized CRBH series bearings for all types of vacuum semiconductor equipments.We provide full-size standard CRBH stock and targeted vacuum low-outgassing customized bearing solutions for wafer fab equipment manufacturers.
Full precision control:All raceways and cylindrical rollers undergo ultra-precision grinding to reach P5,P4 and P2 ultra-high precision standards.Every vacuum-grade CRBH bearing passes degassing baking,low-outgassing and low-particle shedding strict inspection before delivery.
Diverse vacuum customization capacity:Support SUS440 stainless steel anti-corrosion vacuum versions,silicon nitride ceramic hybrid rollers,special low-outgassing vacuum grease treatment,non-standard inner/outer diameter cross-section sizes and brass high-strength cage customized models for ion implanters,sputtering machines and vacuum wafer robots.
Stable fast delivery:Standard CRBH series in stock for 7–15 days;vacuum dedicated customized bearings can complete sample delivery within 10–15 days according to drawing complexity and degassing process schedule.
Authoritative quality certification:All CRBH bearings comply with ISO 9001 and GB/T 307.1 precision bearing standards,and SGS low-outgassing test inspection reports for vacuum application can be provided upon client request.
Global one-stop service:Complete multi-channel global logistics support to deliver vacuum CRBH bearings to semiconductor equipment manufacturers worldwide,with professional technical engineers providing vacuum bearing material,lubricant and model selection guidance for vacuum chamber rotary mechanisms.
For technical specifications,pricing,or custom bearing solutions:
Email:paul@newbeetrans.com
Website:www.newbeetrans.com
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sales@newbeetrans.com
+8615090185276